Prospects: MEMS micro scanning mirrors are one of the core technologies
for realizing LiDAR, HUD, HMD, and smart glasses. Due to their competitiv
e advantages in terms of size, power consumption, and cost, MEMS micro
scanning mirrors are considered a highly promising key technology. For th
e abovementioned applications, MEMS micro scanning mirrors must meet
the challenges of design specifications such as large angles, high frequenc
ies, and large mirror sizes. To meet the upcoming market and business op
portunity, different countries form so-called multi-national R&D alliance
one after another. For example, “LaSAR”, led by STmicroelectronics, con
sists of several European technology power (Germany, France, Italy, and s
o on). Although there are also Taiwanese companies involved, the key tech
nology of MEMS micro mirror still cannot be hold in hand.
Goal: (1) Component: We have developed piezoelectric MEMS micro scan

ning mirrors that meet specifications for automotive and consumer electr
onics applications. (2) Process: Through collaboration with foundries, we h
ave achieved commercialization of the piezoelectric process platform and
assisted in establishing a database of piezoelectric parameters. (3) Modul
e/Applications: The fabricated MEMS micro scanning mirrors are integrate
d into LiDAR and HUD modules based on specific usage requirements, en
abling the integration of optical, mechanical, and electrical modules/syste
ms.
Features:
(1) Mirror size (LiDAR): With a mirror diameter of 3 mm, the scanning angl
e can reach 140 degrees.
(2) Operating frequency (Display): At a driving frequency of 37 kHz, the sc
anning angle can still reach 70 degrees.
(3) Scanning angle (LiDAR / Display): Achieving a scanning angle of 180 de
grees without the need for vacuum packaging. (The world's first)
(4) Operating mode (Display): Capable of projecting nearly vertical patter
n boundaries in dual-axis imaging.