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High-Density 3D Stackable Via-RRAM

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High-Density 3D Stackable Via-RRAM

Introducing a groundbreaking high-density 3D Via Resistive Random Access Memory (RRAM) architecture seamlessly compatible with Fin Field-Effect Transistors (FinFETs) in logic processes. Through the careful design of a structure where vias and metal wires remain intentionally isolated in the layout, a Via RRAM is ingeniously crafted. This approach offers exceptional stackability, permitting each metal wire layer within the memory unit to incorporate a pair of RRAM elements, culminating in the creation of a remarkably high-density stackable embedded memory solution.

National Tsing Hua University

學研單位

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  • Address:No. 101, Section 2, Kuang-Fu Road, Hsinchu City

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  • Pavilion:Future Tech Semiconductor FB30

  • Affiliated Ministry:National Science and Technology Council

  • Application Field:Materials & Chemical Engineering & Nanotech

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  • Technology maturity:Experiment stage

  • Exhibiting purpose:Display of scientific results

  • Trading preferences:Negotiate by self

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