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Highly Sensitive and Corrosion-Resistant Angstrom(Å)-Scale 2D Material Ultra-Thin Films-Based Gas Sensors

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Highly Sensitive and Corrosion-Resistant Angstrom(Å)-Scale 2D Material Ultra-Thin Films-Based Gas Sensors

We develop a low-temperature plasma-assisted selenization technique to grow different 2D materials for high-sensitivity gas sensing applications. It overcomes the current requirement for growth temperatures above 700°C, meeting semiconductor standard processes. The advantages include large-scale production, and tunability of thickness and phase. 2D materials exhibit enhanced corrosion resistance and material stability against corrosive and toxic gases like H2S and NH3.

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  • Pavilion:Future Tech AIoT & Smart Applications FK09

  • Affiliated Ministry:National Science and Technology Council

  • Application Field:Information & Communications

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  • Technology maturity:Trial production

  • Exhibiting purpose:Display of scientific results

  • Trading preferences:Negotiate by self

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