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6" Cluster ALD/ALE Platform Integrated with in-situ XPS Analysis

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6" Cluster ALD/ALE Platform Integrated with in-situ XPS Analysis

The self-developed 6" Cluster ALD/ALE Platform Integrated with in-situ XPS Analysis system is linked with multiple related process equipment to achieve the purpose of in-situ monitoring of the process. We can provide the novel material process R&D and analysis services to the industry, academia, and research institutions.

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  • Pavilion:Future Tech Program Results of Juristic Person FD02

  • Affiliated Ministry:National Science and Technology Council

  • Application Field:Machinery & System

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  • Technology maturity:Trial production

  • Exhibiting purpose:Display of scientific results

  • Trading preferences:Negotiate by self

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