The first large-area plasma material modification equipment under atmosphere, which induces wafer stress homogenization before processing and reduces subsequent processing damage; the process under atmosphere is easy to integrate into the current wafer cutting, grinding and polishing processes
ITRI is a world-leading applied technology research institute with more than 6,000 outstanding employees. Its mission is to drive industrial development, create economic value, and enhance social well-being through technology R&D. Founded in 1973, it pioneered in IC development and started to nurture new tech ventures and deliver its R&D results to industries. ITRI has set up and incubated companies such as TSMC, UMC, Taiwan Mask Corp., Epistar Corp., Mirle Automation Corp., and Taiwan Biomaterial Co.
Name：Chih-Chiang Weng
Phone：03-5918795
Address：195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu, Taiwan 31040, R.O.C.
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Technology maturity：Mass production
Exhibiting purpose：Technology transactions
Trading preferences：Exclusive license/assignment
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