MICAtronics: A Universal Platform for Fabricating Atomically Flat Single-Crystal Metal and Oxide Films
Technology Introduction:
Centering on the Micatronics platform, this technology utilizes the van der Waals epitaxy and flexibility of mica to develop atomically smooth, high-quality single-crystal thin films, including metals (Cu, Ag, Pt, Co, Ni, HEA) and oxides (ZnO, β-Ga2O3). Through electroplating and spontaneous exfoliation, we achieve a large-area, transferable single-crystal platform that significantly enhances 2D material and semiconductor performance while drastically reducing costs.
Industrial Applications:
This technology provides large-area single-crystal metal and oxide platforms for semiconductor packaging, 2D materials, 6G THz communications, and power devices. It enhances Cu–Cu bonding reliability by reducing IMC formation, and serves as an epitaxial substrate for 2D materials. Atomically flat surfaces reduce high-frequency signal loss and scattering. It also improves heat dissipation in Ga2O3 devices via copper backplanes, enabling a low-cost and scalable heterogeneous integration platform.
National Tsing Hua University
National Tsing Hua University (NTHU), established in 1911 and located in Hsinchu, Taiwan, is one of the top research universities in the country. NTHU offers a wide range of programs in fields such as engineering, science, management, and humanities. The university is known for its strong emphasis on innovation, research excellence, and fostering global perspectives. With a commitment to academic rigor and interdisciplinary collaboration, NTHU plays a key role in advancing knowledge and technological development, contributing to both Taiwan’s growth and the global academic community.
Contact Information
Name：Tzu-Ming Chan
Tel：03-571-5131 #35224
Address：No. 101, Section 2, Kuang-Fu Road, Hsinchu City
