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SiC Vacuum Chuck

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Purify silicon carbide particle powder from silicon carbide grinding waste, formula conditioning, powder granulation, forming, degreasing, sintering into a porous material, and then develop a 6-inch circular silicon carbide vacuum chuck for high temperature (300°C) ( SiC vacuum chuck). The developed silicon carbide vacuum chuck is an indispensable carrier for wafer thinning, transportation, and positioning in the current compound semiconductor manufacturing process.

Kallex Company, Ltd.

Kallex Company was founded in 1996, mainly was engaged in silicon carbide (SiC) and other kinds of fine ceramic products research, development and manufacture. Above the present product mainly applies in the anti-wear, anti-corrosive, thermostable, bears the plazma bombardment, the high thermal conduction, the high radiation, the low pollution, the long life and so on. And serves in the enviroment having one kind of or simultaneously several kinds of severe requirement. Such as chemical industry, machinery, smelting, military, semiconductor, LED, solar energy, heat energy management, have trail of Kallex. We grasp "the innovation for to want, the good faith is responsible" the enterprise spirit, with the fine ceramic material specialized technical establishment good quality system, the whole staff implements guarantees take promotes competitive of the customer as the quality policy, and take meets the customer need as to serve the objective. Sincerely invite you to become our precious partner to create the infinite glorious future.

Contact

  • Name:doris

  • Phone:03-496-1188

  • Address:No. 20, Lane 22, Gaoqing Rd, Yangmei District Taoyuan City, Taiwan 326

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Other Information

  • Pavilion:Innovation Pilot Net-Zero IG10

  • Affiliated Ministry:Industrial Development Administration,MOEA

  • Application Field:Materials & Chemical Engineering & Nanotech、Green Energy & Environment

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  • Technology maturity:Trial production

  • Exhibiting purpose:Product promotion、Display of scientific results

  • Trading preferences:Negotiate by self

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