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1.7 kV rating VDMOSFET on 4H-SiC

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1.7 kV rating VDMOSFET on 4H-SiC

We propose a technology to reduce the specific on-resistance (Ron,sp) of 1.7 kV voltage rating VDMOSFET on 4H-SiC, including channel area process optimization, channel and source self-alignment, recessed source contact, etc. The technology improves the Baliga’s figure-of-merit (BFOM), which is superior to existing products and published literature with the same voltage rating, and has the advantage of continuously reducing the cell pitch.

National Yang Ming Chiao Tung University

National Yang Ming Chiao Tung University (NYCU) was formed in 2021 through the merger of National Yang Ming University and National Chiao Tung University. Located in Hsinchu, Taiwan, NYCU is a leading institution specializing in technology, engineering, medicine, and social sciences. The university is known for its strengths in research and innovation, particularly in areas such as information technology, biomedicine, and artificial intelligence. NYCU fosters interdisciplinary collaboration, global partnerships, and aims to nurture professionals with strong academic foundations and leadership skills to address societal challenges and contribute to technological advancements.

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  • Name:Bing-Yue Tsui

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  • Pavilion:Future Tech Semiconductor FB21

  • Affiliated Ministry:National Science and Technology Council

  • Application Field:Electronics & Optoelectronics、Green Energy & Environment

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  • Technology maturity:Prototype

  • Exhibiting purpose:Display of scientific results、Technology transactions

  • Trading preferences:Negotiate by self、Technical license/cooperation

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