SiC CMOS Integrated Circuit and Power MOSFET Integration Technology

Meeting & Discussion

We have developed several world＇s first novel process technologies such as local oxidation of SiC isolation, buried junction isolation, dual-gate oxide, P-type polysilicon gate, etc., to achieve single-chip integration of logic circuits, driver circuits, and vertical power MOSFET, and successfully demonstrate a variety of logic gates and circuits, with substrate voltages from 0 V to 600 V, and normal operation from room temperature to 200 ℃. The unique process technologies and the completeness of circuit integration are superior to international precedents, and are an important breakthrough for smart power modules.

National Yang Ming Chiao Tung University

National Yang Ming Chiao Tung University (NYCU) was formed in 2021 through the merger of National Yang Ming University and National Chiao Tung University. Located in Hsinchu, Taiwan, NYCU is a leading institution specializing in technology, engineering, medicine, and social sciences. The university is known for its strengths in research and innovation, particularly in areas such as information technology, biomedicine, and artificial intelligence. NYCU fosters interdisciplinary collaboration, global partnerships, and aims to nurture professionals with strong academic foundations and leadership skills to address societal challenges and contribute to technological advancements.