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Aluminum Scandium Alloy Sputtering Target in Semiconductor Application

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Aluminum Scandium Alloy Sputtering Target in Semiconductor Application

In order to solve the problem of independent production of the key material aluminum-scandium alloy sputtering target, this technology provides Taiwan target factories with the development of aluminum-scandium sputtering target manufacturing method through metal scandium synthesis, purification, alloy sputtering target manufacturing method. Grasp the source of key target raw materials and establish the core technology of aluminum-scandium alloy target forming.

Industrial Technology Research Institute

ITRI is a world-leading applied technology research institute with more than 6,000 outstanding employees. Its mission is to drive industrial development, create economic value, and enhance social well-being through technology R&D. Founded in 1973, it pioneered in IC development and started to nurture new tech ventures and deliver its R&D results to industries. ITRI has set up and incubated companies such as TSMC, UMC, Taiwan Mask Corp., Epistar Corp., Mirle Automation Corp., and Taiwan Biomaterial Co.

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  • Address:195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu, Taiwan 31040, R.O.C.

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  • Pavilion:Innovation Pilot Discovering Technology Treasures IA52

  • Affiliated Ministry:Department of Industrial Technology,MOEA

  • Application Field:Information & Communications

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  • Technology maturity:Prototype

  • Exhibiting purpose:Display of scientific results

  • Trading preferences:Technical license/cooperation

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