The WBG semi-conductor materials have superior characteristics such as radiation proof, and high temperature/frequency operate. It has been widely applied to RF communication to meet requirements for higher efficiency, power density, and temperature operate. By execution of technology development program，NCSIST develop the SI SiC crystal growth, GaN epitaxy and semiconductor component manufacturing process, AlN metalize substrate techniques for RF industries. Finally, such techniques has applied to development of 40W Ku-band RF PA, and derived relevant patents and technologies for industry.