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In-line semiconductor N2 process critical dimension X-ray metrology tool (XRCD)

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In-line semiconductor N2 process critical dimension X-ray metrology tool (XRCD)

In the 2nm node semiconductor process, GAA three-dimensional structures face challenges such as new materials and require super high resolution monitoring to ensure process yields. The team develops this 2 nm node front-end metrology tool based on X-ray technology. The XRCD metrology tool measures multilayer GAA structures and monitors critical dimensions with atomic-level resolution, reducing measurement time by 90%. The target market includes foundry and memory below N2 process node. The market is expected to be USD 130 million in 2025, with an annual growth rate of 36.8%.

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  • Name:Liu Chun-Ting

  • Phone:+886-3-594-3828

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  • Pavilion:Innovation Pilot Discovering Technology Treasures

  • Affiliated Ministry:Department of Industrial Technology,MOEA

  • Application Field:Materials & Chemical Engineering & Nanotech

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  • Technology maturity:Prototype

  • Exhibiting purpose:Product promotion

  • Trading preferences:Technical license/cooperation

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