Non-Destructive Defect Inspection Technology for Silicon Carbide Ingots
Technology Introduction:
1.Non-Destructive Inspection：Assess internal defects without cutting the SiC ingot.2.AI-Powered Analysis： Rapidly identify defect types and locations through intelligent image analysis.
3.High-Precision Detection：Detect 50 μm micropipes with a false-positive rate below 10%, improving product quality and yield.
Industrial Applications:
ITRI has developed Taiwan's first non-destructive SiC ingot inspection technology that combines X-ray CT and AI image recognition to detect internal defects without cutting. The system can identify micropipes down to 50 μm with a false detection rate below 10%, enabling earlier defect screening, higher production yield, reduced inspection costs, and enhanced quality assurance for SiC manufacturing.
Industrial Technology Research Institute
ITRI is a world-leading applied technology research institute with more than 6,500 outstanding employees. Its mission is to drive industrial development, create economic value, and enhance social well-being through technology R&D. Founded in 1973, it pioneered in IC development and started to nurture new tech ventures and deliver its R&D results to industries. ITRI has set up and incubated companies such as TSMC, UMC, Taiwan Mask Corp., Epistar Corp., Mirle Automation Corp., and Taiwan Biomaterial Co.
Contact Information
Name：Yun-Feng Chen
Tel：06-363-6857
Address：No. 195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu County 310401, Taiwan (R.O.C.)
