OPC+ Universal Cloud Mask Correction Platform: GPU-Accelerated Computational Lithography as a Service Across i-line, KrF, ArF, and Silicon Photonics
Technology Introduction:
OPC+ is the world's first universal cloud OPC platform spanning i-line, KrF 248nm, and ArF 193nm while natively supporting silicon photonics, metalenses, and metasurfaces from a single GPU-accelerated engine. Its CUDA Multi-Stream architecture delivers >50x speedup over CPU tools, and three modes (public, private, hybrid) remove multi-million-dollar EDA licensing barriers. Validated by a completed TSRI KrF 248nm tapeout, with tools under evaluation by ITRI, TSMC, and Texas Instruments.
Industrial Applications:
OPC+'s three deployment modes—public, private, and hybrid cloud—serve SME foundries, fabless design houses, silicon-photonics startups, mask shops, and universities. Confirmed engagements include a TSRI private-cloud server (Q4 2026), TSMC and Texas Instruments tool evaluation, completed MRAM mask correction for a Japanese company, and silicon-photonic validation with the University of Southampton.
National Yang Ming Chiao Tung University
National Yang Ming Chiao Tung University (NYCU) was established on February 1, 2021, through the merger of National Chiao Tung University and National Yang Ming University. By integrating Chiao Tung’s strengths in information, communications, and engineering technologies with Yang Ming’s expertise in biomedical research, NYCU is committed to transcending disciplinary boundaries. The university advances interdisciplinary fields such as digital medicine, bioinformatics, smart technologies, and biomedical applications, while cultivating innovative, globally competitive talent and addressing complex real-world challenges.
Contact Information
Name：Hsiaochun Cheng
Tel：03-571-2121 #56367
Address：No. 1001, Daxue Rd., East Dist., Hsinchu City 300, Taiwan
