With AOI and opto-electro-mechanical integration technologies, The smart inspection equipment with real-time feedback for solar panel can be custom-made developed. Not only its efficiency can be improved by faster than 30 times, but also the manufacturing process can be adjusted according to results of analysis and decision to significantly improve the efficiency and quality of inspection.In addition to improving inspection efficiency, the change from manual sampling to automatic full inspection can substantially increase the number of inspected panels and drastically shorten inspection times. Inspection results can be connected automatically to the computer database to determine possible problems in the process in real time and follow this up by making adjustments to improve production efficiency and manufacturing quality.In addition to inspecting CIGS solar panel, developed technologies can be applied to similar production lines or products inspection in the future, such as glass substrates, flat panel displays (FPD), Thin Film Transistor Liquid Crystal Display (TFT-LCD), printed circuit boards, semiconductor wafers, and even textile leather.