As the component density and operating frequency of ICs continue to increase, probe cards for testing require finer probes. The metal probes of traditional probe cards have low strength, making it impossible to make ultra-fine probes, and the probes are long, which is not conducive to high-frequency (>6 GHz) testing. The assembly is all done by hand one by one. High-strength and high-density probe card technology, innovative development of "high-strength micro-cantilever probe module" and "3D ceramic circuit board": can make ultra-fine probes with a needle diameter of <20 µm; can assemble hundreds of probes at a time, Instead of manual pin-by-pin assembly; it can meet high-frequency test requirements (>6 GHz).This technology has been jointly developed with domestic manufacturers to test probe cards for CIS chips with more than 50 million pixels, which can test 30 chips at a time. In the future, it can be applied to μ-LED probe cards to solve the current bottleneck that there is no suitable probe card for μ-LED wafers for mass production testing.
ITRI is a world-leading applied technology research institute with more than 6,000 outstanding employees. Its mission is to drive industrial development, create economic value, and enhance social well-being through technology R&D. Founded in 1973, it pioneered in IC development and started to nurture new tech ventures and deliver its R&D results to industries. ITRI has set up and incubated companies such as TSMC, UMC, Taiwan Mask Corp., Epistar Corp., Mirle Automation Corp., and Taiwan Biomaterial Co.
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High mobility materials, process, stacked channels, and thermal circuit simulation; Ferroelectric X:HfO2 for Negative Capacitance and POC(Proof-of-Concept) Applications; Atomic layer technologies for
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