Technology Introduction:
This project, "CMOS-compatible Quantum Processor with silicon-based Spin Qubits and Cryo-CMOS Integrated System," aims to advance quantum technology by leveraging manufacturing and design technologies established within Taiwan's semiconductor industry. The project focuses on CMOS-compatible spin qubits as its core technology and seeks to develop the peripheral cryogenic CMOS system as an integrated system. Spin qubits offer long coherence times and seamless compatibility with Taiwan’s semiconductor and electronic industries. The key goals include integrating these qubits with cryogenic CMOS circuits in an integrated design. Our team will utilize isotope-purified silicon (28Si) to enhance performance and optimize FinFET and Ge/SiGe heterostructures for qubit fabrication at the Taiwan Semiconductor Research Institute (TSRI). Another central part of this work involves developing low-noise, low-power cryo-CMOS circuits for both qubit control and readout. Additionally, we aim to integrate the qubits with the cryo-CMOS circuits using advanced semiconductor packaging techniques. Ultimately, this project seeks to build a vertical integrated ecosystem for a full-stack quantum processor in research, manufacturing, and characterization.