Applications
•Health or Pollution sensor

Problem/Solution:
The use of gas nano-sensors has recently attracted significant interest in industrial, medical and environmental applications. In particular, nitrogen oxide/dioxide (NOx) can be used as a potential indicator for health (e.g. asthma marker) and pollution conditions. However, fabrication of these nano-sensors is not compatible with complementary metal-oxide silicon (CMOS) technology, and thus, miniaturization cannot be fully realized.
An ultrasensitive NOx gas sensor based on a porous film of iron nanocubes has been developed. Well-defined iron nanoparticles with controlled size and shape were deposited on gold electrodes using CMOS compatible technology. These iron nanocubes undergo electrical changes when exposed to NOx which enables detection.

Benefits:
・Miniaturized NOx gas sensor
・Low cost thin film allows detection of very low　concentrations (ppb level) of NOx gas.
・CMOS (complementary metal-oxide silicon)　compatible method.

Keywords:
NO gas sensor, NO2 gas sensor, Fe nanocubes, nanomaterials, semiconductor devices