High-Efficiency Processing via Material Modification
The first large-area plasma material modification equipment under atmosphere, which induces wafer stress homogenization before processing and reduces subsequent processing damage; the process under atmosphere is easy to integrate into the current wafer cutting, grinding and polishing processes
Industrial Applications:
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Industrial Technology Research Institute
ITRI is a world-leading applied technology research institute with more than 6,000 outstanding employees. Its mission is to drive industrial development, create economic value, and enhance social well-being through technology R&D. Founded in 1973, it pioneered in IC development and started to nurture new tech ventures and deliver its R&D results to industries. ITRI has set up and incubated companies such as TSMC, UMC, Taiwan Mask Corp., Epistar Corp., Mirle Automation Corp., and Taiwan Biomaterial Co.
Contact Information
Name：Chih-Chiang Weng
Tel：03-5918795
Address：195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu, Taiwan 31040, R.O.C.
Additional Information
Pavilion：Innovation Economy Semiconductor IC10
Exhibiting Entity：Department of Industrial Technology,MOEA
Application Category：Materials, Chemical Engineering and Nanotech、Machinery and System
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Pavilion：Innovation Economy Semiconductor IC10
Exhibiting Entity：Department of Industrial Technology,MOEA
Application Category：Materials, Chemical Engineering and Nanotech、Machinery and System
