As the market penetration rate of mobile phones, automotive electronics and electric vehicles has increased, which has prompted an increase in the demand for 5G high-frequency and high power chips. The global semiconductor manufacturers have listed compound semiconductors as their key development business. it is the only domestic CVD SiC coating technology of high-temperature corrosion-resistant susceptor for compound semiconductor process application that can be used .The average film thickness is 100±35μm, and the warpage is less than 500μm. It can be applied to high-end key components such as compound semiconductors, semiconductors and UVC LEDs, and provides complete autonomy and competitiveness for the domestic upstream key carrier supply chain.