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We exploit deep learning techniques to develop EDA tools for semiconductor manufacturing. Our EDA tools can predict circuit shape distortions caused by the lithography processes and thus assess the photomask correction results at an early stage. These tools can be applied to layout's OPC simulation, layout hotspot detection, IC defect detection, and photomask optimization.

National Chung Hsing University

學研單位

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  • Address:No.145, Xingda Rd., South Dist., Taichung City 402, Taiwan

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  • Pavilion:Future Tech Semiconductor FB31

  • Affiliated Ministry:National Science and Technology Council

  • Application Field:Materials & Chemical Engineering & Nanotech

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  • Technology maturity:Experiment stage

  • Exhibiting purpose:Display of scientific results

  • Trading preferences:Negotiate by self

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