This demonstration presents an active-matrix, 1920x1080, 370 nm UV MicroLED display. There are 2,073,600 pixels fabricated on this display which is smaller than a dollar coin, and its diagonal has an extremely high pixel density of 3200 pixels per inch (ppi). The size of each pixel is 5 μm in diameter, and the pixel pitch is 8 μm. The key technology of this achievement lies in the fabrication of pixels with good characteristics and high uniformity, and the successful development of flip-chip technology combining MicroLED and driving integrated circuit pixels. This result can display images and videos.

This demonstration presents an active-matrix, 1920x1080, 3200 ppi, 370 nm ultraviolet MicroLED display with a pixel of 5 μm and a pitch of 8 μm. It can be claimed to be a real MicroLED display. This achievement is also the first in the world to show that UV MicroLED displays can be used in the photomaskless process. We placed the photoresist-coated sample onto the MicroLED screen, and then the MicroLED screen was used to display the desired image in mirror writing. Then the UV light image can be exposed to the test sample to achieve the application of maskless photolithography.

1. The future approach is to use UV MicroLED to excite red, green and blue phosphors to develop the next-generation full-color displays.
2. The MicroLED display can display high-resolution images and videos, and can be used in applications of augmented reality, virtual reality.
3. The 370 nm UV MicroLED display can be used as the exposure source of the aligner. There is no need to prepare a photomask and it can reduce the time and cost required for making photomasks. It is expected to replace the traditional mercury lamp exposure source and become a new application for MicroLED displays.

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