In this work, we demonstrate a dual multiplication layers In0.52Al0.48As based avalanche photodiode, which is desired for ToF lidar and FMCW lidar application due to its high performances in both Geiger and linear mode operations. By combining the specially designed mesa shape with dual M-layer structure, the edge breakdown can be well suppressed. We eventually achieve a single photon detection efficiency of 61.4％ and neat temporal characteristic of 65ps without the involvement of afterpulsing at the gating frequency of 10 kHz for 200 K under Geiger mode operation. On the other hand, we can also achieve high gain-bandwidth product and high saturation current under linear mode (0.9 Vbr) operation. High photo-generated RF power from our APD with a high responsivity can be simultaneously achieved. The demonstrated APD opens new possibilities in the receiver-end of next generation lidar.

We achieve a single photon detection efficiency of 61.4％ and neat temporal characteristic of 65ps without the involvement of afterpulsing at the gating frequency of 10 kHz for 200 K in Geiger mode operation. On the other hand, we can also achieve high gain-bandwidth product (450GHz) and high saturation current (>12mA) under linear mode operation. The corresponding photo-generated RF power from our APD can be as high as ＋6.95 dBm at a high (7 mA) output photocurrent. The demonstrated APD opens new possibilities in the receiver-end of next generation lidar.

LiDAR has become a crucial technology in many different areas including robots, scientific research, remote sensing and medical applications as well as in autonomous vehicle there has been tremendous progress attained over the past few years. The two most used lidar techniques which meet these requirements, involve the pulsed beam (based on the time of flight (ToF) principle) and frequency-modulated continuous wave (FMCW) approaches.
The detector technology we demonstrate here can further improve the sensitivity in such two kinds of lidar systems.

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