The team established material doping technology to greatly improve the piezoelectric properties of lead-free materials, and successfully prepared MEMS lead-free triaxial piezoelectric accelerometers.

The use of lead-free materials is the world＇s first development result. In addition, the team also integrated sensors, back-end circuits and user interfaces, applied the acceleration gauge system to the safety monitoring of unmanned vehicles, and successfully integrated the intelligent integrated sensing and control system required in the Internet of Things era.
Our team has broken through the piezoelectric properties of the existing material ZnO and integrated with the MEMS process. We has successfully developed the world＇s first MEMS lead-free piezoelectric triaxial accelerometer, and continues to integrate the upstream "piezoelectric material synthesis and accelerometer production", midstream "accelerometer circuit and module design" and downstream "user platform system development" to independently develop a set of IoT systems to accelerate the world The sensor field has opened up a new path.
Taking into account the rising global environmental awareness, the regulations for lead-containing products are becoming stricter, such as the EU＇s RoHS hazardous substances restriction regulations. In the future, lead-containing products will gradually be phased out in the future, and lead-free products will become the mainstream of the future market.

The MEMS lead-free piezoelectric accelerometer that our team has developed has the advantages of small size, light weight, wafer heterogeneous integration technology and CMOS process, etc., and can now be applied to vibration environment sensing such as unmanned vehicles.

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