The Micro-Detector Array (MDA) aims to monitor the uniformity of dosage in various processes, including EUV, DUV, e-Beam, and Ion-Beam. The MDA is capable to measure critical dimensions, image log slope, and pattern edge location. Meanwhile, MDA is fully compatible with logic process, which provides advantages of high contrast in intensity, wide dynamic range, built-in calibration, and instant WAT analysis. These features enable the MDA to monitor process parameter variation.
National Tsing Hua University (NTHU), established in 1911 and located in Hsinchu, Taiwan, is one of the top research universities in the country. NTHU offers a wide range of programs in fields such as engineering, science, management, and humanities. The university is known for its strong emphasis on innovation, research excellence, and fostering global perspectives. With a commitment to academic rigor and interdisciplinary collaboration, NTHU plays a key role in advancing knowledge and technological development, contributing to both Taiwan’s growth and the global academic community.
Advanced Automatic Detection Technology for EL Inspection and IR Ther mal Defects in Solar Modules
Hybrid CMOS Inverter Comprised of Thin Film Transistors with Hetero-channel for Monolithic 3D-ICs and Ultra-high Resolution Flat-Panel Displays Applications
Energy-Efficient Optimization Problem Decision: Neural Network-based In-Memory Annealing Units for Route Scheduling and Genome Assembly
Monolithic 3D Heterogeneous Device Integration and Innovative Materials for Breaking Logic Density Limits: A Key Technology Platform for High-Density AI Computing Chips
Technology maturity：Prototype
Exhibiting purpose：Display of scientific results
Trading preferences：Negotiate by self
*Organization
*Name
*Phone
*Main Purpose
*Discuss Further
*Job Category
*Overall Rating
*Favorite Area
*Key Tech Focus
*Willing to Receive Updates?
Other Suggestions
Coming soon!