Technology Introduction:
Phosphorus ion implantation into undoped Ga₂O₃ grown by MOCVD, followed by optimized annealing, yields p-type conductivity confirmed by Hall measurements. An n-type Ga₂O₃ layer is then epitaxially regrown, enabling fabrication of a lateral PN homojunction diode. These results confirm that phosphorus implantation is a reliable method for forming stable p-type Ga₂O₃, offering a viable path for future oxide semiconductor device applications.
Industry Applicability:
Over the past two years, our first-principles simulations identified phosphorus as a viable dopant for p-type Ga₂O₃. We found that phosphorus-related defect formation energies are low, prompting experimental studies using ion implantation. The successful formation of p-type Ga₂O₃ was confirmed and published in Materials Today Advances (2023). Device-level validation, including in-situ doping and various structures, confirms that stable, high-quality p-Ga₂O₃ is achievable.