Light-Field Scanning Measurement Instrument for Metalens and High-Precision Lens
Technology Introduction:
As metalenses continue to advance toward higher precision and greater miniaturization, the quality of their nanoscale structures has a direct impact on optical performance. Conventional inspection methods rely on destructive sampling using electron microscopes and cannot comprehensively evaluate the overall optical characteristics of a device. ITRI's Measurement Center has developed a Light Field Scanning Inspection System that non-destructively measures the three-dimensional light-field distribution throughout the entire depth of focus of a metalens, reconstructs the wavefront phase, and verifies fabrication quality. The system integrates AI algorithms to analyze imaging performance and identify defect sources, enabling quantitative evaluation of focal length deviation, wavefront error, and structural abnormalities. It also establishes correlation models between optical performance and nanoscale structures, enhancing metalens inspection and diagnostic capabilities.
Industrial Applications:
This system can be applied to metalens research and development, manufacturing, and mass-production inspection processes, providing rapid and non-destructive optical quality verification. By measuring the three-dimensional light-field distribution and reconstructing the wavefront phase, it can analyze imaging performance, focal length deviation, and fabrication defects, enabling manufacturers to promptly adjust process parameters and equipment conditions to improve product yield and consistency. The system is applicable to AR/VR devices, smartphone cameras, optical sensors, and semiconductor optical components. Furthermore, it can be integrated with AI-based analysis technologies to establish an intelligent closed-loop manufacturing mechanism, accelerating the mass production and adoption of next-generation optical devices.
Industrial Technology Research Institute
ITRI is a world-leading applied technology research institute with more than 6,500 outstanding employees. Its mission is to drive industrial development, create economic value, and enhance social well-being through technology R&D. Founded in 1973, it pioneered in IC development and started to nurture new tech ventures and deliver its R&D results to industries. ITRI has set up and incubated companies such as TSMC, UMC, Taiwan Mask Corp., Epistar Corp., Mirle Automation Corp., and Taiwan Biomaterial Co.
Contact Information
Name：YehChiaLiang
Tel：03-574-3702
Address：No. 195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu County 310401, Taiwan (R.O.C.)
